Combination Systems

Busch combination systems are the ideal solution for backing high vacuum pumps for load lock and coating applications in the solar and semiconductor markets. Available with a choice of a dry screw or a wet vane backing pump, each combination system utilizes our bypass booster technology that affords system operation from atmospheric pressure to end (or operating) pressure. With no cut in of the booster required, the result is enhanced evacuation performance and reduced pull down times due to higher flow across the vacuum region.